JPH01125529U - - Google Patents
Info
- Publication number
- JPH01125529U JPH01125529U JP2201488U JP2201488U JPH01125529U JP H01125529 U JPH01125529 U JP H01125529U JP 2201488 U JP2201488 U JP 2201488U JP 2201488 U JP2201488 U JP 2201488U JP H01125529 U JPH01125529 U JP H01125529U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrodes
- reaction tank
- rollers
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 239000007790 solid phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2201488U JPH01125529U (en]) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2201488U JPH01125529U (en]) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125529U true JPH01125529U (en]) | 1989-08-28 |
Family
ID=31239751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2201488U Pending JPH01125529U (en]) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125529U (en]) |
-
1988
- 1988-02-22 JP JP2201488U patent/JPH01125529U/ja active Pending
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